products pic 00221
 products pic 00220
 
products pic 00207
 

Item

Items

Spec

1

Glass size

¼ G3.5 ~ G6 , Up to 1500mm x 1850mm
2

Substrate

Mask、Bare Glass 、TFT Patten
3

Optical Resolution

More than 1.4 um
4

Target Defects

Hole, Particles ,Open/Short
5

Defect information

Defect position, Defect size, Defect type ,Defect area
6 Option SPC
7 Option Review System (1.5X~15X, 2.X~20X, 5~50X)
8 Option 3D Profile Height measurement
 
 
 
products pic 00222
 
products pic 00223
 
  products pic 00207
 

Item

Items

Spec

1

Glass size

¼ G3.5 ~ G6 , Up to 1500mm x 1850mm
2

Substrate

Inside Chamber – Frit on Single Cover
Inside FAB– Frit after Assembly

3

Optical Resolution

More than 10um
4

Target Defects

Bobble, Scrape, Broken, Particles
5

Defect information

Defect position, Defect size, Defect type ,Defect area
6 Option SPC
7 Option Review System (1.5X~15X, 2.X~20X, 5~50X)
8 Option

Laser Height measurement

 
 
products pic 00224
 
products pic 00225
 
products pic 00207
 

Item

Items

Spec

1

Glass size

¼ G3.5 ~ G6 , Up to 1500mm x 1850mm
2

Substrate

Auto Probe Transfer / Power supply turn on design

3

Function

Gray Measurement
4

Function

Color Measurement
5

Function

THK  Measurement
6 Function CD Test key Measurement
7 Option SPC
8 Option

Review System

 
 
products pic 00226
products pic 00211
 
products pic 00207
 

Item

Items

Spec

1

Glass size

G3.5/4/4.5/5/6/7.5/8.5, Up to 2200mm x 2500mm
2

Glass thickness

0.3mm~1.1mm
3

Wave length

248 nm - 830 nm
4

Spot size

Approx. 500μm x 500μm;Approx. 1mm x 2mm

5

Option

SR meter
6

Option

Rs meter
7

Option

Contact angle
8

Option

Stress meter
 
 
 
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