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Item

Items

Spec

1

Euipment dimension

250X320X450mm(W/L/H)

2

Wafer size

125×125/156×156mm

3

Wafer type

Mono/Multi Crystal

4

Cycle time/Thought put

≦ 2sec /120 piece

5

Wafer erroneous judgment rate

〈 0.05 %

6

Optics

Non. Contact optical system /FOV:0~28mm

7

Function

Recipe edit, time to exposure, light strength

8

Control System

PC-based /Windows XP

 
 
 
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